@inproceedings{e86045047f5c4c7082ff7ddd5fef60ae,
title = "Suspended photonic waveguide arrays for submicrometer alignment",
keywords = "Conf.proc. > 3 pag",
author = "TJ Peters and M Tichem and U Staufer",
note = "Harvest; Silicon Photonics and Photonic Integrated Circuits IV, Brussels, Belgium ; Conference date: 14-04-2014 Through 17-04-2014",
year = "2014",
doi = "10.1117/12.2052430",
language = "English",
isbn = "9781628410815",
publisher = "SPIE",
pages = "1--10",
editor = "L Vivien and S Honkanen and L Pavesi and S Pelli",
booktitle = "Proceedings of SPIE: Silicon Photonics and Photonic Integrated Circuits IV",
address = "United States",
}