Suspended submicron silicon-beam for high sensitivity piezoresistive sensing

J Wei, S Magnani, PM Sarro

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

1 Citation (Scopus)
Original languageEnglish
Title of host publicationProceedings Eurosensors XXV, 2011
EditorsC Tsamis, G Kaltas
Place of PublicationAthens, Greece
PublisherElsevier
Pages1437-1440
Number of pages4
DOIs
Publication statusPublished - 2011
EventEurosensors XXV - Athens, Greece
Duration: 4 Sep 20117 Sep 2011

Publication series

Name
PublisherElsevier
NameProcedia Engineering
Volume25
ISSN (Print)1877-7058

Conference

ConferenceEurosensors XXV
Period4/09/117/09/11

Keywords

  • conference contrib. refereed
  • Conf.proc. > 3 pag

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