Suspended submicron silicon-beam for high sensitivity piezoresistive force sensing cantilevers

J Wei, S Magnani, PM Sarro

Research output: Contribution to journalArticleScientificpeer-review

13 Citations (Scopus)

Bibliographical note

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Betreft: Selected papers Eurosensors XXV, Athens, Greece, 4 - 7 September 2011

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