Suspended submicron silicon-beam for high sensitivity piezoresistive force sensing cantilevers

Research output: Contribution to journal › Article › Scientific › peer-review

15 Citations (Scopus)

Original language	English
Pages (from-to)	80-85
Number of pages	6
Journal	Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers
Volume	186
DOIs	https://doi.org/10.1016/j.sna.2012.02.021
Publication status	Published - 2012

harvest
Betreft: Selected papers Eurosensors XXV, Athens, Greece, 4 - 7 September 2011

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@article{2994923774c648ae95b7aa9a090c0b4f,

title = "Suspended submicron silicon-beam for high sensitivity piezoresistive force sensing cantilevers",

author = "J Wei and S Magnani and PM Sarro",

note = "harvest Betreft: Selected papers Eurosensors XXV, Athens, Greece, 4 - 7 September 2011",

year = "2012",

doi = "10.1016/j.sna.2012.02.021",

language = "English",

volume = "186",

pages = "80--85",

journal = "Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers",

issn = "0924-4247",

publisher = "Elsevier",

}

Research output: Contribution to journal › Article › Scientific › peer-review

TY - JOUR

T1 - Suspended submicron silicon-beam for high sensitivity piezoresistive force sensing cantilevers

AU - Wei, J

AU - Magnani, S

AU - Sarro, PM

N1 - harvest Betreft: Selected papers Eurosensors XXV, Athens, Greece, 4 - 7 September 2011

PY - 2012

Y1 - 2012

U2 - 10.1016/j.sna.2012.02.021

DO - 10.1016/j.sna.2012.02.021

M3 - Article

SN - 0924-4247

VL - 186

SP - 80

EP - 85

JO - Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers

JF - Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers

ER -