Suspended tungsten trioxide (WO3) gate AlGaN/GaN heterostructure deep ultraviolet detectors with integrated micro-heater

Jianwen Sun, Teng Zhan, Zewen Liu, Junxi Wang, Xiaoyan Yi, Pasqualina M. Sarro, Guoqi Zhang

Research output: Contribution to journalArticleScientificpeer-review

3 Citations (Scopus)
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Abstract

A suspended WO3-gate AlGaN/GaN heterostructure photodetector integrated with a micro-heater is micro-fabricated and characterized for ultraviolet photo detection. The transient optical characteristics of the photodetector at different temperatures are studied. The 2DEG-based photodetector shows a recovery (170 s) time under 240 nm illumination at 150 ℃. The measured spectral response of WO3-gate AlGaN/GaN heterostructure shows a high response in deep ultraviolet range. Responsivity at 240 nm wavelength is 4600 A/W at 0.5 V bias. These characteristics support the feasibility of a high accuracy deep UV detector based on the suspended AlGaN/GaN heterostructure integrated with a micro-heater.

Original languageEnglish
Pages (from-to)36405-36413
Number of pages9
JournalOptics Express
Volume27
Issue number25
DOIs
Publication statusPublished - 2019

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