TY - GEN
T1 - Synergy between quantum computing and semiconductor technology
AU - Verberk, Rogier
AU - Michalak, David J.
AU - Versluis, Richard
AU - Polinder, Henk
AU - Samkharadze, Nodar
AU - Amitonov, Sergey
AU - Sammak, Amir
AU - Tryputen, Larysa
AU - Brousse, Delphine
AU - Hanfoug, Rabah
N1 - Green Open Access added to TU Delft Institutional Repository ‘You share, we take care!’ – Taverne project https://www.openaccess.nl/en/you-share-we-take-care Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.
PY - 2022
Y1 - 2022
N2 - As part of the National Agenda for Quantum Technology, QuTech (TU Delft and TNO) has agreed to make quantum technology accessible to society and industry via its full-stack prototype: Quantum Inspire. This system includes two different types of programmable quantum chips: circuits made from superconducting materials (transmons), and circuits made from silicon-based materials that localize and control single-electron spins (spin qubits). Silicon-based spin qubits are a natural match to the semiconductor manufacturing community, and several industrial fabrication facilities are already producing spin-qubit chips. Here, we discuss our latest results in spin-qubit technology and highlight where the semiconducting community has opportunities to drive the field forward. Specifically, developments in the following areas would enable fabrication of more powerful spin-qubit based quantum computing devices: circuit design rules implementing cryogenic device physics models, high-fidelity gate patterning of low resistance or superconducting metals, gate-oxide defect mitigation in relevant materials, silicon-germanium heterostructure optimization, and accurate magnetic field generation from on-chip micromagnets.
AB - As part of the National Agenda for Quantum Technology, QuTech (TU Delft and TNO) has agreed to make quantum technology accessible to society and industry via its full-stack prototype: Quantum Inspire. This system includes two different types of programmable quantum chips: circuits made from superconducting materials (transmons), and circuits made from silicon-based materials that localize and control single-electron spins (spin qubits). Silicon-based spin qubits are a natural match to the semiconductor manufacturing community, and several industrial fabrication facilities are already producing spin-qubit chips. Here, we discuss our latest results in spin-qubit technology and highlight where the semiconducting community has opportunities to drive the field forward. Specifically, developments in the following areas would enable fabrication of more powerful spin-qubit based quantum computing devices: circuit design rules implementing cryogenic device physics models, high-fidelity gate patterning of low resistance or superconducting metals, gate-oxide defect mitigation in relevant materials, silicon-germanium heterostructure optimization, and accurate magnetic field generation from on-chip micromagnets.
KW - Device Manufacturing
KW - Quantum Computing
KW - Spin Qubit in Silicon
UR - http://www.scopus.com/inward/record.url?scp=85142482192&partnerID=8YFLogxK
U2 - 10.1117/12.2639994
DO - 10.1117/12.2639994
M3 - Conference contribution
AN - SCOPUS:85142482192
T3 - Proceedings of SPIE - The International Society for Optical Engineering
BT - 37th European Mask and Lithography Conference
A2 - Behringer, Uwe F. W.
PB - SPIE
T2 - 37th European Mask and Lithography Conference
Y2 - 20 June 2022 through 23 June 2022
ER -