Synergy between quantum computing and semiconductor technology

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As part of the National Agenda for Quantum Technology, QuTech (TU Delft and TNO) has agreed to make quantum technology accessible to society and industry via its full-stack prototype: Quantum Inspire. This system includes two different types of programmable quantum chips: circuits made from superconducting materials (transmons), and circuits made from silicon-based materials that localize and control single-electron spins (spin qubits). Silicon-based spin qubits are a natural match to the semiconductor manufacturing community, and several industrial fabrication facilities are already producing spin-qubit chips. Here, we discuss our latest results in spin-qubit technology and highlight where the semiconducting community has opportunities to drive the field forward. Specifically, developments in the following areas would enable fabrication of more powerful spin-qubit based quantum computing devices: circuit design rules implementing cryogenic device physics models, high-fidelity gate patterning of low resistance or superconducting metals, gate-oxide defect mitigation in relevant materials, silicon-germanium heterostructure optimization, and accurate magnetic field generation from on-chip micromagnets.

Original languageEnglish
Title of host publication37th European Mask and Lithography Conference
EditorsUwe F. W. Behringer
Number of pages16
ISBN (Electronic)9781510660496
Publication statusPublished - 2022
Event37th European Mask and Lithography Conference - Leuven, Belgium
Duration: 20 Jun 202223 Jun 2022

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X


Conference37th European Mask and Lithography Conference

Bibliographical note

Green Open Access added to TU Delft Institutional Repository ‘You share, we take care!’ – Taverne project Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.


  • Device Manufacturing
  • Quantum Computing
  • Spin Qubit in Silicon


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