Synthesis of polycrystalline silicon films on metalized ceramic substrates with laser-asisted chemical vapor deposition

G Korevaar, W Besling, APLM Goossens, J Schoonman

    Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

    Original languageUndefined/Unknown
    Title of host publicationProceedings of the Twelfth European Conference on Chemical Vapour Deposition (EuroCVD-12)
    EditorsA Figueras
    PublisherEDP Sciences
    Number of pages6
    Publication statusPublished - 1999

    Publication series

    PublisherEDP Sciences France

    Bibliographical note

    ISSN: 1155-4339

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