System and method for generating a crystal orientation control polysilicon film

PC van der Wilt (Inventor), R Ishihara (Inventor)

Research output: Patent

Original languageEnglish
Patent numberJP 5068171B2
Priority date28/11/04
Publication statusPublished - 7 Nov 2012

Keywords

  • ZX Int.klas.verslagjaar < 2002

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