System and method for micro- and nanoelectromechanical sample mass measurement

H Sadeghian Marnani (Inventor), CK Yang (Inventor), F van Keulen (Inventor), JFL Goosen (Inventor), A Bossche (Inventor), PJ French (Inventor)

Research output: Patent

Original languageUndefined/Unknown
Patent number2003643
IPCOp naam van TU Delft
Priority date14/10/09
Publication statusPublished - 2009

Keywords

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  • Geen VSNU-classificatie

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