Abstract
Models that contain intersample behavior are important for control design of systems with slow-rate outputs. The aim of this paper is to develop a system identification technique for fast-rate models of systems where only slow-rate output measurements are available, e.g., vision-in-the-loop systems. In this paper, the intersample response is estimated by identifying fast-rate models through least-squares criteria, and the limitations of these models are determined. In addition, a method is developed that surpasses these limitations and is capable of estimating unique fast-rate models of arbitrary order by regularizing the least-squares estimate. The developed method utilizes fast-rate inputs and slow-rate output measurements and identifies fast-rate models accurately in a single identification experiment. Finally, both simulation and experimental validation on a prototype wafer stage demonstrate the effectiveness of the framework.
| Original language | English |
|---|---|
| Article number | 106425 |
| Number of pages | 9 |
| Journal | Control Engineering Practice |
| Volume | 164 |
| DOIs | |
| Publication status | Published - 2025 |
Keywords
- Frequency response functions
- Kernel-regularized estimation
- Multirate
- Sampled-data systems
- System identification
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