Systematic analysis of unobscured mirror systems for microlithography.

F Bociort, MF Bal, JJM Braat

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

Original language	Undefined/Unknown
Title of host publication	Proceedings of the 2 nd International Conference on Optical Design and Fabrication
Editors	K Tatsuno
Pages	339-342
Number of pages	4
Publication status	Published - 2000

ODF2000

Keywords

@inproceedings{5805fb39e17a4c7c8598448b410c4453,

title = "Systematic analysis of unobscured mirror systems for microlithography.",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "F Bociort and MF Bal and JJM Braat",

note = "ODF2000",

year = "2000",

language = "Undefined/Unknown",

pages = "339--342",

editor = "K Tatsuno",

booktitle = "Proceedings of the 2 nd International Conference on Optical Design and Fabrication",

}