Systematic characterization of optical beam deflection measurement system for micro and nanomechanical systems

RW Herfst, W Klop, M Eschen, TC van den Dool, NB Koster, H Sadeghian Marnani

Research output: Contribution to journalArticleScientificpeer-review

17 Citations (Scopus)
Original languageEnglish
Pages (from-to)104-116
Number of pages13
JournalMeasurement
Volume56
DOIs
Publication statusPublished - 2014

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