Systematic characterization of optical beam deflection measurement system for micro and nanomechanical systems

RW Herfst, W Klop, M Eschen, TC van den Dool, NB Koster, H Sadeghian Marnani

Research output: Contribution to journal › Article › Scientific › peer-review

19 Citations (Scopus)

NEO
Available online 5 July 2014

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@article{9be40c279fdf4e34bba1640dd2a0b230,

title = "Systematic characterization of optical beam deflection measurement system for micro and nanomechanical systems",

author = "RW Herfst and W Klop and M Eschen and {van den Dool}, TC and NB Koster and {Sadeghian Marnani}, H",

note = "NEO Available online 5 July 2014",

year = "2014",

doi = "10.1016/j.measurement.2014.06.016",

language = "English",

volume = "56",

pages = "104--116",

journal = "Measurement",

issn = "0263-2241",

publisher = "Elsevier",

}

TY - JOUR

T1 - Systematic characterization of optical beam deflection measurement system for micro and nanomechanical systems

AU - Herfst, RW

AU - Klop, W

AU - Eschen, M

AU - van den Dool, TC

AU - Koster, NB

AU - Sadeghian Marnani, H

N1 - NEO Available online 5 July 2014

PY - 2014

Y1 - 2014

U2 - 10.1016/j.measurement.2014.06.016

DO - 10.1016/j.measurement.2014.06.016

M3 - Article

SN - 0263-2241

VL - 56

SP - 104

EP - 116

JO - Measurement

JF - Measurement

ER -