Systematic positron study of hydrophilicity of the internal pore surface in ordered low-k silica thin films

R Escobar Galindo, A van Veen, H Schut, SWH Eijt, CV Falub, AR Balkenende, F.K. de Theije

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	403-408
Number of pages	6
Journal	Materials Science and Engineering B: Advanced Functional Solid-state Materials
Volume	B 102
Publication status	Published - 2003

Keywords

@article{c988dceb75544ed78853c43bc9900ee9,

title = "Systematic positron study of hydrophilicity of the internal pore surface in ordered low-k silica thin films",

keywords = "ZX CWTS JFIS < 1.00",

author = "{Escobar Galindo}, R and {van Veen}, A and H Schut and SWH Eijt and CV Falub and AR Balkenende and {de Theije}, F.K.",

year = "2003",

language = "Undefined/Unknown",

volume = "B 102",

pages = "403--408",

journal = "Materials Science and Engineering B: Advanced Functional Solid-state Materials",

issn = "0921-5107",

publisher = "Elsevier",

}

TY - JOUR

T1 - Systematic positron study of hydrophilicity of the internal pore surface in ordered low-k silica thin films

AU - Escobar Galindo, R

AU - van Veen, A

AU - Schut, H

AU - Eijt, SWH

AU - Falub, CV

AU - Balkenende, AR

AU - de Theije, F.K.

PY - 2003

Y1 - 2003

KW - ZX CWTS JFIS < 1.00

M3 - Article

SN - 0921-5107

VL - B 102

SP - 403

EP - 408

JO - Materials Science and Engineering B: Advanced Functional Solid-state Materials

JF - Materials Science and Engineering B: Advanced Functional Solid-state Materials

ER -