Tailoring material properties for 3D microfabrication: In-situ experimentation and multi-scale modelling

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Abstract

Vertically aligned carbon nanotube arrays (CNTs) are a nanoscale material that can be grown from the bottom up in a fast and controlled manner to form large microstructures. Combined with thin conformal coatings, we gain accurate control over the material properties of nano-porous CNT arrays. This paper deals with three topics involving nanoscale materials for microfabrication; (1) microfabrication steps for 3D micro-structures using CNTs arrays and thin conformal coatings, (2) the (in-situ) experimental characterization of the material and (3) a multi-scale modelling approach for analysing the mechanical material properties of CNT pillars.
Original languageEnglish
Title of host publication2016 17th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE)
PublisherIEEE
Pages1-6
Number of pages6
ISBN (Electronic)978-1-5090-2106-2
DOIs
Publication statusPublished - 2016
EventEuroSimE 2016: 17th International Conference on Thermal Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems - Montpellier, France
Duration: 17 Apr 201620 Apr 2016
Conference number: 17
https://www.eurosime.org/index.php/2016-montpellier/

Conference

ConferenceEuroSimE 2016
CountryFrance
CityMontpellier
Period17/04/1620/04/16
Internet address

Keywords

  • Coatings
  • Mathematical model
  • Material properties
  • Nanoscale devices
  • Force
  • Three-dimensional displays
  • Carbon nanotubes

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