Abstract
Vertically aligned carbon nanotube arrays (CNTs) are a nanoscale material that can be grown from the bottom up in a fast and controlled manner to form large microstructures. Combined with thin conformal coatings, we gain accurate control over the material properties of nano-porous CNT arrays. This paper deals with three topics involving nanoscale materials for microfabrication; (1) microfabrication steps for 3D micro-structures using CNTs arrays and thin conformal coatings, (2) the (in-situ) experimental characterization of the material and (3) a multi-scale modelling approach for analysing the mechanical material properties of CNT pillars.
Original language | English |
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Title of host publication | 2016 17th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE) |
Publisher | IEEE |
Pages | 1-6 |
Number of pages | 6 |
ISBN (Electronic) | 978-1-5090-2106-2 |
DOIs | |
Publication status | Published - 2016 |
Event | EuroSimE 2016: 17th International Conference on Thermal Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems - Montpellier, France Duration: 17 Apr 2016 → 20 Apr 2016 Conference number: 17 https://www.eurosime.org/index.php/2016-montpellier/ |
Conference
Conference | EuroSimE 2016 |
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Country/Territory | France |
City | Montpellier |
Period | 17/04/16 → 20/04/16 |
Internet address |
Keywords
- Coatings
- Mathematical model
- Material properties
- Nanoscale devices
- Force
- Three-dimensional displays
- Carbon nanotubes