Tailoring material properties for 3D microfabrication: In-situ experimentation and multi-scale modelling

Rene Poelma; X.J. Fan; Erik Schlangen; Henk van Zeijl; Guo Qi Zhang

doi:10.1109/EuroSimE.2016.7463402

Tailoring material properties for 3D microfabrication: In-situ experimentation and multi-scale modelling

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Abstract

Vertically aligned carbon nanotube arrays (CNTs) are a nanoscale material that can be grown from the bottom up in a fast and controlled manner to form large microstructures. Combined with thin conformal coatings, we gain accurate control over the material properties of nano-porous CNT arrays. This paper deals with three topics involving nanoscale materials for microfabrication; (1) microfabrication steps for 3D micro-structures using CNTs arrays and thin conformal coatings, (2) the (in-situ) experimental characterization of the material and (3) a multi-scale modelling approach for analysing the mechanical material properties of CNT pillars.

Original language	English
Title of host publication	2016 17th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE)
Publisher	IEEE
Pages	1-6
Number of pages	6
ISBN (Electronic)	978-1-5090-2106-2
DOIs	https://doi.org/10.1109/EuroSimE.2016.7463402
Publication status	Published - 2016
Event	EuroSimE 2016: 17th International Conference on Thermal Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems - Montpellier, France Duration: 17 Apr 2016 → 20 Apr 2016 Conference number: 17 https://www.eurosime.org/index.php/2016-montpellier/

Conference

Conference	EuroSimE 2016
Country/Territory	France
City	Montpellier
Period	17/04/16 → 20/04/16
Internet address	https://www.eurosime.org/index.php/2016-montpellier/

Keywords

Coatings
Mathematical model
Material properties
Nanoscale devices
Force
Three-dimensional displays
Carbon nanotubes

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10.1109/EuroSimE.2016.7463402

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Poelma, R., Fan, X. J., Schlangen, E., van Zeijl, H., & Zhang, G. Q. (2016). Tailoring material properties for 3D microfabrication: In-situ experimentation and multi-scale modelling. In 2016 17th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE) (pp. 1-6). IEEE. https://doi.org/10.1109/EuroSimE.2016.7463402

@inproceedings{04efe77d25254a229f343d62b3216618,

title = "Tailoring material properties for 3D microfabrication: In-situ experimentation and multi-scale modelling",

abstract = "Vertically aligned carbon nanotube arrays (CNTs) are a nanoscale material that can be grown from the bottom up in a fast and controlled manner to form large microstructures. Combined with thin conformal coatings, we gain accurate control over the material properties of nano-porous CNT arrays. This paper deals with three topics involving nanoscale materials for microfabrication; (1) microfabrication steps for 3D micro-structures using CNTs arrays and thin conformal coatings, (2) the (in-situ) experimental characterization of the material and (3) a multi-scale modelling approach for analysing the mechanical material properties of CNT pillars.",

keywords = "Coatings, Mathematical model, Material properties, Nanoscale devices, Force, Three-dimensional displays, Carbon nanotubes",

author = "Rene Poelma and X.J. Fan and Erik Schlangen and \{van Zeijl\}, Henk and Zhang, \{Guo Qi\}",

year = "2016",

doi = "10.1109/EuroSimE.2016.7463402",

language = "English",

pages = "1--6",

booktitle = "2016 17th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE)",

publisher = "IEEE",

address = "United States",

note = "EuroSimE 2016 : 17th International Conference on Thermal Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems ; Conference date: 17-04-2016 Through 20-04-2016",

url = "https://www.eurosime.org/index.php/2016-montpellier/",

}

Poelma, R, Fan, XJ, Schlangen, E , van Zeijl, H & Zhang, GQ 2016, Tailoring material properties for 3D microfabrication: In-situ experimentation and multi-scale modelling. in 2016 17th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE). IEEE, pp. 1-6, EuroSimE 2016, Montpellier, France, 17/04/16. https://doi.org/10.1109/EuroSimE.2016.7463402

Tailoring material properties for 3D microfabrication: In-situ experimentation and multi-scale modelling. / Poelma, Rene; Fan, X.J.; Schlangen, Erik et al.
2016 17th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE). IEEE, 2016. p. 1-6.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Tailoring material properties for 3D microfabrication: In-situ experimentation and multi-scale modelling

AU - Poelma, Rene

AU - Fan, X.J.

AU - Schlangen, Erik

AU - van Zeijl, Henk

AU - Zhang, Guo Qi

N1 - Conference code: 17

PY - 2016

Y1 - 2016

N2 - Vertically aligned carbon nanotube arrays (CNTs) are a nanoscale material that can be grown from the bottom up in a fast and controlled manner to form large microstructures. Combined with thin conformal coatings, we gain accurate control over the material properties of nano-porous CNT arrays. This paper deals with three topics involving nanoscale materials for microfabrication; (1) microfabrication steps for 3D micro-structures using CNTs arrays and thin conformal coatings, (2) the (in-situ) experimental characterization of the material and (3) a multi-scale modelling approach for analysing the mechanical material properties of CNT pillars.

AB - Vertically aligned carbon nanotube arrays (CNTs) are a nanoscale material that can be grown from the bottom up in a fast and controlled manner to form large microstructures. Combined with thin conformal coatings, we gain accurate control over the material properties of nano-porous CNT arrays. This paper deals with three topics involving nanoscale materials for microfabrication; (1) microfabrication steps for 3D micro-structures using CNTs arrays and thin conformal coatings, (2) the (in-situ) experimental characterization of the material and (3) a multi-scale modelling approach for analysing the mechanical material properties of CNT pillars.

KW - Coatings

KW - Mathematical model

KW - Material properties

KW - Nanoscale devices

KW - Force

KW - Three-dimensional displays

KW - Carbon nanotubes

U2 - 10.1109/EuroSimE.2016.7463402

DO - 10.1109/EuroSimE.2016.7463402

M3 - Conference contribution

SP - 1

EP - 6

BT - 2016 17th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE)

PB - IEEE

T2 - EuroSimE 2016

Y2 - 17 April 2016 through 20 April 2016

ER -

Tailoring material properties for 3D microfabrication: In-situ experimentation and multi-scale modelling

Abstract

Conference

Keywords

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