Tapered SU8 Waveguide for Evanescent Sensing by Single–Step Fabrication

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

2 Citations (Scopus)

Abstract

In this paper, a novel vertical waveguide made from SU8 photoresist is proposed for the first time to be used in an evanescent bio-medical optical sensor. The vertical structure increases the sensing area and can be fabricated in a one-step lithography step enabling easy and high-resolution fabrication and making this waveguide attractive in optical sensing. Tapers were added to the system improving the alignment tolerance and enabling the manufacturing of plug-and-play optical system.
Original languageEnglish
Title of host publicationProceedings of IEEE Sensors Conference 2017
Place of PublicationPiscataway, NJ
PublisherIEEE
Pages1-3
Number of pages3
ISBN (Electronic)978-1-5090-1012-7
ISBN (Print)978-1-5090-1013-4
DOIs
Publication statusPublished - 2017
EventIEEE SENSORS 2017 - Glasgow, United Kingdom
Duration: 29 Oct 20171 Nov 2017
http://ieee-sensors2017.org/

Conference

ConferenceIEEE SENSORS 2017
CountryUnited Kingdom
CityGlasgow
Period29/10/171/11/17
Internet address

Keywords

  • vertical waveguide
  • SU8
  • evanescent wave
  • tapered
  • sensing

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