Tapered SU8 Waveguide for Evanescent Sensing by Single–Step Fabrication

Yu Xin; Gregory Pandraud; Anja van Langen-Suurling; Paddy French

doi:10.1109/ICSENS.2017.8233929

Tapered SU8 Waveguide for Evanescent Sensing by Single–Step Fabrication

Yu Xin, Gregory Pandraud, Anja van Langen-Suurling, Paddy French

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

2 Citations (Scopus)

Abstract

In this paper, a novel vertical waveguide made from SU8 photoresist is proposed for the first time to be used in an evanescent bio-medical optical sensor. The vertical structure increases the sensing area and can be fabricated in a one-step lithography step enabling easy and high-resolution fabrication and making this waveguide attractive in optical sensing. Tapers were added to the system improving the alignment tolerance and enabling the manufacturing of plug-and-play optical system.

Original language	English
Title of host publication	Proceedings of IEEE Sensors Conference 2017
Place of Publication	Piscataway, NJ
Publisher	IEEE
Pages	1-3
Number of pages	3
ISBN (Electronic)	978-1-5090-1012-7
ISBN (Print)	978-1-5090-1013-4
DOIs	https://doi.org/10.1109/ICSENS.2017.8233929
Publication status	Published - 2017
Event	IEEE SENSORS 2017 - Glasgow, United Kingdom Duration: 29 Oct 2017 → 1 Nov 2017 http://ieee-sensors2017.org/

Conference

Conference	IEEE SENSORS 2017
Country/Territory	United Kingdom
City	Glasgow
Period	29/10/17 → 1/11/17
Internet address	http://ieee-sensors2017.org/

Keywords

vertical waveguide
SU8
evanescent wave
tapered
sensing

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10.1109/ICSENS.2017.8233929

Cite this

@inproceedings{cd6f7fef8a6a4db2bab6bf7b116982b7,

title = "Tapered SU8 Waveguide for Evanescent Sensing by Single–Step Fabrication",

abstract = "In this paper, a novel vertical waveguide made from SU8 photoresist is proposed for the first time to be used in an evanescent bio-medical optical sensor. The vertical structure increases the sensing area and can be fabricated in a one-step lithography step enabling easy and high-resolution fabrication and making this waveguide attractive in optical sensing. Tapers were added to the system improving the alignment tolerance and enabling the manufacturing of plug-and-play optical system.",

keywords = "vertical waveguide, SU8, evanescent wave, tapered, sensing",

author = "Yu Xin and Gregory Pandraud and {van Langen-Suurling}, Anja and Paddy French",

year = "2017",

doi = "10.1109/ICSENS.2017.8233929",

language = "English",

isbn = "978-1-5090-1013-4",

pages = "1--3",

booktitle = "Proceedings of IEEE Sensors Conference 2017",

publisher = "IEEE",

address = "United States",

note = "IEEE SENSORS 2017 ; Conference date: 29-10-2017 Through 01-11-2017",

url = "http://ieee-sensors2017.org/",

}

TY - GEN

T1 - Tapered SU8 Waveguide for Evanescent Sensing by Single–Step Fabrication

AU - Xin, Yu

AU - Pandraud, Gregory

AU - van Langen-Suurling, Anja

AU - French, Paddy

PY - 2017

Y1 - 2017

N2 - In this paper, a novel vertical waveguide made from SU8 photoresist is proposed for the first time to be used in an evanescent bio-medical optical sensor. The vertical structure increases the sensing area and can be fabricated in a one-step lithography step enabling easy and high-resolution fabrication and making this waveguide attractive in optical sensing. Tapers were added to the system improving the alignment tolerance and enabling the manufacturing of plug-and-play optical system.

AB - In this paper, a novel vertical waveguide made from SU8 photoresist is proposed for the first time to be used in an evanescent bio-medical optical sensor. The vertical structure increases the sensing area and can be fabricated in a one-step lithography step enabling easy and high-resolution fabrication and making this waveguide attractive in optical sensing. Tapers were added to the system improving the alignment tolerance and enabling the manufacturing of plug-and-play optical system.

KW - vertical waveguide

KW - SU8

KW - evanescent wave

KW - tapered

KW - sensing

U2 - 10.1109/ICSENS.2017.8233929

DO - 10.1109/ICSENS.2017.8233929

M3 - Conference contribution

SN - 978-1-5090-1013-4

SP - 1

EP - 3

BT - Proceedings of IEEE Sensors Conference 2017

PB - IEEE

CY - Piscataway, NJ

T2 - IEEE SENSORS 2017

Y2 - 29 October 2017 through 1 November 2017

ER -

Tapered SU8 Waveguide for Evanescent Sensing by Single–Step Fabrication

Abstract

Conference

Keywords

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