Tastings and theory

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Abstract

Ferrofluid bearings have recently been successfully implemented in precise
positioning systems. This article gives an overview of systems built in the
Department of Precision and Microsystems Engineering at Delft University
of Technology in the Netherlands. Most applications are in microscope stages,
where high accuracy is important while stroke and speed attain only moderate
levels. Furthermore, some basic theory is provided on ferrofluid bearings that
can help engineers incorporate ferrofluid bearings in their designs.
Original languageEnglish
Pages (from-to)15-19
JournalMikroniek: vakblad voor precisie-technologie
Volume58
Issue number2
Publication statusPublished - 2018

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