Technology and applications of micromachined adaptive mirrors

G Vdovin, PM Sarro, S Middelhoek

Research output: Contribution to journalArticleScientificpeer-review

47 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)1-19
Number of pages19
JournalJournal of Micromechanics and Microengineering
Volume9
Publication statusPublished - 1999

Keywords

  • ZX Int.klas.verslagjaar < 2002

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