Technology and applications of micromachined silicon adaptive mirrors

G Vdovin, S Middelhoek, PM Sarro

Research output: Chapter in Book/Conference proceedings/Edited volume › Chapter › Scientific › peer-review

Original language	Undefined/Unknown
Title of host publication	Selected papers on optical MEMS [SPIE milestone series, vol. MS 153]
Editors	VM Bright, BJ Thompson
Place of Publication	Bellingham
Publisher	International Society for Optical Engineering
Pages	304-312
ISBN (Print)	0-8194-3129-X
Publication status	Published - 1999

Keywords

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title = "Technology and applications of micromachined silicon adaptive mirrors",

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author = "G Vdovin and S Middelhoek and PM Sarro",

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Technology and applications of micromachined silicon adaptive mirrors. / Vdovin, G; Middelhoek, S; Sarro, PM.
Selected papers on optical MEMS [SPIE milestone series, vol. MS 153]. ed. / VM Bright; BJ Thompson. Bellingham: International Society for Optical Engineering, 1999. p. 304-312.

Research output: Chapter in Book/Conference proceedings/Edited volume › Chapter › Scientific › peer-review

TY - CHAP

T1 - Technology and applications of micromachined silicon adaptive mirrors

AU - Vdovin, G

AU - Middelhoek, S

AU - Sarro, PM

PY - 1999

Y1 - 1999

KW - ZX Int.klas.verslagjaar < 2002

M3 - Chapter

SN - 0-8194-3129-X

SP - 304

EP - 312

BT - Selected papers on optical MEMS [SPIE milestone series, vol. MS 153]

A2 - VM Bright, null

A2 - BJ Thompson, null

PB - International Society for Optical Engineering

CY - Bellingham

ER -