Technology and applications of micromachined silicon adaptive mirrors

G Vdovin, S Middelhoek, PM Sarro

Research output: Chapter in Book/Conference proceedings/Edited volumeChapterScientificpeer-review

Original languageUndefined/Unknown
Title of host publicationSelected papers on optical MEMS [SPIE milestone series, vol. MS 153]
Editors VM Bright, BJ Thompson
Place of PublicationBellingham
PublisherInternational Society for Optical Engineering
ISBN (Print)0-8194-3129-X
Publication statusPublished - 1999


  • ZX Int.klas.verslagjaar < 2002

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