@inproceedings{21d5ddf075ef4e94aa38b6057a0ab497,
title = "Technology for integrated spatial light modulators based on reflective membranes",
keywords = "Elektrotechniek, Techniek, Conf.proc. > 3 pag",
author = "S Sakarya and GV Vdovin and PM Sarro",
year = "2002",
language = "Undefined/Unknown",
isbn = "0-8194-4207-0",
publisher = "SPIE",
pages = "21--28",
editor = "JD Gonglewski and MA Vorontsov and MT Gruneisen",
booktitle = "High-resolution wavefront control: methods, devices, and applications III",
address = "United States",
note = "High-resolution wavefront control: methods, devices, and applications III ; Conference date: 01-08-2001 Through 03-08-2001",
}