@inproceedings{338d9de714784b45ba595310b1609634,
title = "Technology of reflective membranes for spatial light modulators",
keywords = "ZX Int.klas.verslagjaar < 2002",
author = "S Sakarya and G Vdovin and PM Sarro",
year = "2001",
language = "Undefined/Unknown",
isbn = "3-540-42150-5",
publisher = "Springer",
pages = "1336--1339",
editor = "{E Obermeier}",
booktitle = "Tansducers'01: technical papers",
note = "11th International Conference on Solid-State Sensors and Actuators, Munich ; Conference date: 10-06-2001 Through 14-06-2001",
}