Technology of reflective micromachined pixelated membranes for use in spatial light modulators

S Sakarya, G Vdovin, PM Sarro

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	Undefined/Unknown
Title of host publication	SAFE-ProRISC-SeSens 2000: proceedings
Editors	JP Veen
Place of Publication	Utrecht
Publisher	STW Technology Foundation
Pages	689-691
Number of pages	3
ISBN (Print)	90-73461-24-3
Publication status	Published - 2000
Event	Semiconductor Advances for Future Electronics - Program for Research on Integrated Systems and Circuits - Semiconductor Sensor and Actuator Technology, Veldhoven - Utrecht Duration: 28 Nov 2001 → 30 Nov 2001

Name
Publisher	STW technology foundation

Conference	Semiconductor Advances for Future Electronics - Program for Research on Integrated Systems and Circuits - Semiconductor Sensor and Actuator Technology, Veldhoven
Period	28/11/01 → 30/11/01

Keywords

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title = "Technology of reflective micromachined pixelated membranes for use in spatial light modulators",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "S Sakarya and G Vdovin and PM Sarro",

year = "2000",

language = "Undefined/Unknown",

isbn = "90-73461-24-3",

publisher = "STW Technology Foundation",

pages = "689--691",

editor = "{JP Veen}",

booktitle = "SAFE-ProRISC-SeSens 2000: proceedings",

note = "null ; Conference date: 28-11-2001 Through 30-11-2001",

}

Sakarya, S, Vdovin, G & Sarro, PM 2000, Technology of reflective micromachined pixelated membranes for use in spatial light modulators. in JP Veen (ed.), SAFE-ProRISC-SeSens 2000: proceedings. STW Technology Foundation, Utrecht, pp. 689-691, Semiconductor Advances for Future Electronics - Program for Research on Integrated Systems and Circuits - Semiconductor Sensor and Actuator Technology, Veldhoven, 28/11/01.

TY - GEN

T1 - Technology of reflective micromachined pixelated membranes for use in spatial light modulators

AU - Sakarya, S

AU - Vdovin, G

AU - Sarro, PM

PY - 2000

Y1 - 2000

KW - ZX Int.klas.verslagjaar < 2002

M3 - Conference contribution

SN - 90-73461-24-3

SP - 689

EP - 691

BT - SAFE-ProRISC-SeSens 2000: proceedings

A2 - JP Veen, null

PB - STW Technology Foundation

CY - Utrecht

Y2 - 28 November 2001 through 30 November 2001

ER -