@inproceedings{1f031cf3b84f4037bdcf4a508c5a1f19,
title = "Technology of reflective micromachined pixelated membranes for use in spatial light modulators",
keywords = "ZX Int.klas.verslagjaar < 2002",
author = "S Sakarya and G Vdovin and PM Sarro",
year = "2000",
language = "Undefined/Unknown",
isbn = "90-73461-24-3",
publisher = "STW Technology Foundation",
pages = "689--691",
editor = "{JP Veen}",
booktitle = "SAFE-ProRISC-SeSens 2000: proceedings",
note = "Semiconductor Advances for Future Electronics - Program for Research on Integrated Systems and Circuits - Semiconductor Sensor and Actuator Technology, Veldhoven ; Conference date: 28-11-2001 Through 30-11-2001",
}