TEM investigation of excimer-laser recrystallised Si layers with a crystalline seed in the underlaying Si-oxide, 0%, 50%, 70% and 90% laser transmissions

FD Tichelaar; TR de Kruijff

TEM investigation of excimer-laser recrystallised Si layers with a crystalline seed in the underlaying Si-oxide, 0%, 50%, 70% and 90% laser transmissions

Research output: Book/Report › Report › Professional

Original language	Undefined/Unknown
Place of Publication	Delft
Publisher	Technische Universiteit Delft
Number of pages	7
Publication status	Published - 2002

Publication series

Name
Publisher	TUD

Bibliographical note

+ 34 TEM afdrukken

Keywords

Geen BTA classificatie

Cite this

@book{63c949aece394035b260f9dc78041366,

title = "TEM investigation of excimer-laser recrystallised Si layers with a crystalline seed in the underlaying Si-oxide, 0%, 50%, 70% and 90% laser transmissions",

keywords = "Geen BTA classificatie",

author = "FD Tichelaar and {de Kruijff}, TR",

note = "+ 34 TEM afdrukken",

year = "2002",

language = "Undefined/Unknown",

publisher = "Technische Universiteit Delft",

}

TY - BOOK

T1 - TEM investigation of excimer-laser recrystallised Si layers with a crystalline seed in the underlaying Si-oxide, 0%, 50%, 70% and 90% laser transmissions

AU - Tichelaar, FD

AU - de Kruijff, TR

N1 - + 34 TEM afdrukken

PY - 2002

Y1 - 2002

KW - Geen BTA classificatie

M3 - Report

BT - TEM investigation of excimer-laser recrystallised Si layers with a crystalline seed in the underlaying Si-oxide, 0%, 50%, 70% and 90% laser transmissions

PB - Technische Universiteit Delft

CY - Delft

ER -