Temperature dependence of chemical-vapor deposition of pure boron layers from diborane

V Mohammadi, WB De Boer, LK Nanver

Research output: Contribution to journalArticleScientificpeer-review

26 Citations (Scopus)
Original languageEnglish
Pages (from-to)1-5
Number of pages5
JournalApplied Physics Letters
Volume101
Issue number11
DOIs
Publication statusPublished - 2012

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Article number: 111906

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