Temperature dependence of chemical-vapor deposition of pure boron layers from diborane

V Mohammadi; WB De Boer; LK Nanver

doi:10.1063/1.4752109

Temperature dependence of chemical-vapor deposition of pure boron layers from diborane

V Mohammadi, WB De Boer, LK Nanver

Electronic Components, Technology and Materials

Research output: Contribution to journal › Article › Scientific › peer-review

31 Citations (Scopus)

Original language	English
Pages (from-to)	1-5
Number of pages	5
Journal	Applied Physics Letters
Volume	101
Issue number	11
DOIs	https://doi.org/10.1063/1.4752109
Publication status	Published - 2012

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Harvest
Article number: 111906

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Temperature dependence of chemical-vapor deposition of pure boron layers from diborane

Bibliographical note

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