Temperature influence on etching deep holes with SF6/O2 cryogenic plasma.

G Craciun, MA Blauw, EWJM van der Drift, PM Sarro, PJ French

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

Original languageUndefined/Unknown
Title of host publicationProceedings of the 12th Micromechanics Europe Workshop MME.
EditorsM Hill
Pages62-65
Number of pages4
Publication statusPublished - 2001

Keywords

  • ZX Int.klas.verslagjaar < 2002

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