Temperature influence on etching deep holes with SF6/O2 cryogenic plasma

G Cracium, MA Blauw, PM Sarro, PJ French

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

Original language	Undefined/Unknown
Title of host publication	MMe 2001:workshop
Place of Publication	S.l.
Publisher	s.n.
Pages	62-65
Number of pages	4
Publication status	Published - 2001
Event	12th Micromechanics Europe Workshop, Cork - S.l. Duration: 16 Sept 2001 → 18 Sept 2001

Name
Publisher	S.n.

Conference	12th Micromechanics Europe Workshop, Cork
Period	16/09/01 → 18/09/01

Keywords

@inproceedings{2a997e26db1b4deea1c744151ae87ec7,

title = "Temperature influence on etching deep holes with SF6/O2 cryogenic plasma",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "G Cracium and MA Blauw and PM Sarro and PJ French",

year = "2001",

language = "Undefined/Unknown",

publisher = "s.n.",

pages = "62--65",

booktitle = "MMe 2001:workshop",

note = "12th Micromechanics Europe Workshop, Cork ; Conference date: 16-09-2001 Through 18-09-2001",

}

TY - GEN

T1 - Temperature influence on etching deep holes with SF6/O2 cryogenic plasma

AU - Cracium, G

AU - Blauw, MA

AU - Sarro, PM

AU - French, PJ

PY - 2001

Y1 - 2001

KW - ZX Int.klas.verslagjaar < 2002

M3 - Conference contribution

SP - 62

EP - 65

BT - MMe 2001:workshop

PB - s.n.

CY - S.l.

T2 - 12th Micromechanics Europe Workshop, Cork

Y2 - 16 September 2001 through 18 September 2001

ER -