Temperature sensitivity of silicon cantilevers' elasticity with the electrostatic pull-in instability

H Sadeghian Marnani, D Yang, JFL Goosen, A Bossche, PJ French, F van Keulen

Research output: Contribution to journalArticleScientificpeer-review

8 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Temperature sensitivity of silicon cantilevers' elasticity with the electrostatic pull-in instability'. Together they form a unique fingerprint.

INIS

Material Science

Engineering