Temperature Sensitivity of Silicon Cantilevers with the Pull-in Instability Method

H Sadeghian Marnani; CK Yang; JFL Goosen; A Bossche; PJ French; F van Keulen

Temperature Sensitivity of Silicon Cantilevers with the Pull-in Instability Method

H Sadeghian Marnani, CK Yang, JFL Goosen, A Bossche, PJ French, F van Keulen

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

Abstract

In this paper the temperature effect on [110] Silicon cantilevers is analyzed and measured in the range of 25 - 100°C. The quasi-static electrostatic pull-in instability method developed recently for ultra-thin cantilevers ["Characterizing Size-dependent Effective Elastic Modulus of Silicon Nanocantilevers Using Electrostatic Pull-in Instability", Applied Physics Letters, Vol. 94 (22), p. 221903, 2009] is employed to measure the temperature sensitivity of ultra-thin cantilevers. A temperature sensitivity of 81.3°C/V is obtained. the temperature sensitivity is mostly due to the temperature dependence of the effective Young's Modulus of silicon. It is shown that changes in geometrical dimensions due to the change in temperature can be neglected. The changes in the effective Young's Modulus due to the changes in temperture are extracted using an electromechanical-coupled system. The pull-in method showed substantial advantages over other methods used for the study of the thermal effects on micron and sub-micron structures. The results demonstrate a new concept for a temperature sensor with ultra high sensitivity. Keywords: temperature sensitivity, pull-in instability, cantilever, nanoelectromechanical systems.

Original language	Undefined/Unknown
Title of host publication	Proceedings of the Eurosensors XXIII Conference, 6-9 September 2009, Lausanne, Switzerland
Editors	Brugger, J., Briand, D.
Place of Publication	Lausanne, Switzerland
Publisher	Elsevier
Pages	1387-1390
Number of pages	4
ISBN (Print)	1876-6196
Publication status	Published - 2009
Event	Eurosensors XXIII - Lausanne, Switzerland Duration: 6 Sept 2009 → 9 Sept 2009

Publication series

Name
Publisher	Elsevier

Conference

Conference	Eurosensors XXIII
Country/Territory	Switzerland
City	Lausanne
Period	6/09/09 → 9/09/09

Keywords

conference contrib. refereed
Conf.proc. > 3 pag

Cite this

@inproceedings{8928b99a6f1d42abba403854ccbc2e5e,

title = "Temperature Sensitivity of Silicon Cantilevers with the Pull-in Instability Method",

abstract = "In this paper the temperature effect on [110] Silicon cantilevers is analyzed and measured in the range of 25 - 100°C. The quasi-static electrostatic pull-in instability method developed recently for ultra-thin cantilevers [{"}Characterizing Size-dependent Effective Elastic Modulus of Silicon Nanocantilevers Using Electrostatic Pull-in Instability{"}, Applied Physics Letters, Vol. 94 (22), p. 221903, 2009] is employed to measure the temperature sensitivity of ultra-thin cantilevers. A temperature sensitivity of 81.3°C/V is obtained. the temperature sensitivity is mostly due to the temperature dependence of the effective Young's Modulus of silicon. It is shown that changes in geometrical dimensions due to the change in temperature can be neglected. The changes in the effective Young's Modulus due to the changes in temperture are extracted using an electromechanical-coupled system. The pull-in method showed substantial advantages over other methods used for the study of the thermal effects on micron and sub-micron structures. The results demonstrate a new concept for a temperature sensor with ultra high sensitivity. Keywords: temperature sensitivity, pull-in instability, cantilever, nanoelectromechanical systems.",

keywords = "conference contrib. refereed, Conf.proc. > 3 pag",

author = "{Sadeghian Marnani}, H and CK Yang and JFL Goosen and A Bossche and PJ French and {van Keulen}, F",

year = "2009",

language = "Undefined/Unknown",

isbn = "1876-6196",

publisher = "Elsevier",

pages = "1387--1390",

editor = "{Brugger, J.} and {Briand, D.}",

booktitle = "Proceedings of the Eurosensors XXIII Conference, 6-9 September 2009, Lausanne, Switzerland",

note = "Eurosensors XXIII ; Conference date: 06-09-2009 Through 09-09-2009",

}

Sadeghian Marnani, H, Yang, CK , Goosen, JFL , Bossche, A , French, PJ & van Keulen, F 2009, Temperature Sensitivity of Silicon Cantilevers with the Pull-in Instability Method. in Brugger, J. & Briand, D. (eds), Proceedings of the Eurosensors XXIII Conference, 6-9 September 2009, Lausanne, Switzerland. Elsevier, Lausanne, Switzerland, pp. 1387-1390, Eurosensors XXIII, Lausanne, Switzerland, 6/09/09.

Temperature Sensitivity of Silicon Cantilevers with the Pull-in Instability Method. / Sadeghian Marnani, H; Yang, CK ; Goosen, JFL et al.
Proceedings of the Eurosensors XXIII Conference, 6-9 September 2009, Lausanne, Switzerland. ed. / Brugger, J.; Briand, D. Lausanne, Switzerland: Elsevier, 2009. p. 1387-1390.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

TY - GEN

T1 - Temperature Sensitivity of Silicon Cantilevers with the Pull-in Instability Method

AU - Sadeghian Marnani, H

AU - Yang, CK

AU - Goosen, JFL

AU - Bossche, A

AU - French, PJ

AU - van Keulen, F

PY - 2009

Y1 - 2009

N2 - In this paper the temperature effect on [110] Silicon cantilevers is analyzed and measured in the range of 25 - 100°C. The quasi-static electrostatic pull-in instability method developed recently for ultra-thin cantilevers ["Characterizing Size-dependent Effective Elastic Modulus of Silicon Nanocantilevers Using Electrostatic Pull-in Instability", Applied Physics Letters, Vol. 94 (22), p. 221903, 2009] is employed to measure the temperature sensitivity of ultra-thin cantilevers. A temperature sensitivity of 81.3°C/V is obtained. the temperature sensitivity is mostly due to the temperature dependence of the effective Young's Modulus of silicon. It is shown that changes in geometrical dimensions due to the change in temperature can be neglected. The changes in the effective Young's Modulus due to the changes in temperture are extracted using an electromechanical-coupled system. The pull-in method showed substantial advantages over other methods used for the study of the thermal effects on micron and sub-micron structures. The results demonstrate a new concept for a temperature sensor with ultra high sensitivity. Keywords: temperature sensitivity, pull-in instability, cantilever, nanoelectromechanical systems.

AB - In this paper the temperature effect on [110] Silicon cantilevers is analyzed and measured in the range of 25 - 100°C. The quasi-static electrostatic pull-in instability method developed recently for ultra-thin cantilevers ["Characterizing Size-dependent Effective Elastic Modulus of Silicon Nanocantilevers Using Electrostatic Pull-in Instability", Applied Physics Letters, Vol. 94 (22), p. 221903, 2009] is employed to measure the temperature sensitivity of ultra-thin cantilevers. A temperature sensitivity of 81.3°C/V is obtained. the temperature sensitivity is mostly due to the temperature dependence of the effective Young's Modulus of silicon. It is shown that changes in geometrical dimensions due to the change in temperature can be neglected. The changes in the effective Young's Modulus due to the changes in temperture are extracted using an electromechanical-coupled system. The pull-in method showed substantial advantages over other methods used for the study of the thermal effects on micron and sub-micron structures. The results demonstrate a new concept for a temperature sensor with ultra high sensitivity. Keywords: temperature sensitivity, pull-in instability, cantilever, nanoelectromechanical systems.

KW - conference contrib. refereed

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SN - 1876-6196

SP - 1387

EP - 1390

BT - Proceedings of the Eurosensors XXIII Conference, 6-9 September 2009, Lausanne, Switzerland

A2 - Brugger, J., null

A2 - Briand, D., null

PB - Elsevier

CY - Lausanne, Switzerland

T2 - Eurosensors XXIII

Y2 - 6 September 2009 through 9 September 2009

ER -