@inproceedings{2a72b22d3f574090b58447f2283d6b3c,
title = "Temperature Sensitivity of Silicon Cantilevers with the Pull-in Instability Method",
keywords = "conference contrib. refereed, Conf.proc. > 3 pag",
author = "{Sadeghian Marnani}, H and CK Yang and JFL Goosen and A Bossche and PJ French and {van Keulen}, F",
year = "2009",
language = "Undefined/Unknown",
isbn = "1876-6196",
publisher = "Elsevier",
pages = "1387--1390",
editor = "{Brugger, J.} and {Briand, D.}",
booktitle = "Proceedings of the Eurosensors XXIII Conference, 6-9 September 2009, Lausanne, Switzerland",
note = "Eurosensors XXIII ; Conference date: 06-09-2009 Through 09-09-2009",
}