| Original language | Undefined/Unknown |
|---|---|
| Pages (from-to) | 369-372 |
| Number of pages | 4 |
| Journal | Microelectronic Engineering |
| Volume | 30 |
| Publication status | Published - 1996 |
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AJM van der Harg, BAC Rousseeuw, EWJM van der Drift
Research output: Contribution to journal › Article › Scientific › peer-review
| Original language | Undefined/Unknown |
|---|---|
| Pages (from-to) | 369-372 |
| Number of pages | 4 |
| Journal | Microelectronic Engineering |
| Volume | 30 |
| Publication status | Published - 1996 |