Tensile stress in hard metal films

GCAM Janssen, AJ Dammers, VGM Sivel, WR Wang

    Research output: Contribution to journalArticleScientificpeer-review

    53 Citations (Scopus)
    Original languageUndefined/Unknown
    Pages (from-to)3287-3289
    Number of pages3
    JournalApplied Physics Letters
    Volume83
    Issue number16
    Publication statusPublished - 2003

    Keywords

    • ZX CWTS 1.00 <= JFIS < 3.00

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