Tensile stress in hard metal films

GCAM Janssen, AJ Dammers, VGM Sivel, WR Wang

Research output: Contribution to journal › Article › Scientific › peer-review

Keywords

@article{3a94c5a4b3a54d388c4833505ed9c3a4,

title = "Tensile stress in hard metal films",

keywords = "ZX CWTS 1.00 <= JFIS < 3.00",

author = "GCAM Janssen and AJ Dammers and VGM Sivel and WR Wang",

year = "2003",

language = "Undefined/Unknown",

volume = "83",

pages = "3287--3289",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics Publising LLC",

number = "16",

}