Tensile stress in hard metal films

GCAM Janssen, AJ Dammers, VGM Sivel, WR Wang

    Research output: Book/Report › Report › Scientific

    57 Citations (Scopus)
    Original languageUndefined/Unknown
    Place of PublicationUtrecht
    PublisherFOM-Utrecht
    Number of pages1
    Publication statusPublished - 2003

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    PublisherFOM-Utrecht

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