Texture formation in sputter-deposited (Nb0.7,Ti0.3)N thin films

N Iossad, NM van der Pers, S Grachev, VV Roddatis, BD Jackson, SN Polyakov, PN Dmitriev, TM Klapwijk

Research output: Contribution to journal › Article › Scientific › peer-review

Keywords

@article{b99ca054231b472c9a608ee921d2d7b8,

title = "Texture formation in sputter-deposited (Nb0.7,Ti0.3)N thin films",

keywords = "academic journal papers, ZX CWTS 1.00 <= JFIS < 3.00",

author = "N Iossad and {van der Pers}, NM and S Grachev and VV Roddatis and BD Jackson and SN Polyakov and PN Dmitriev and TM Klapwijk",

year = "2002",

language = "Undefined/Unknown",

volume = "92",

pages = "4999--5005",

journal = "Journal of Applied Physics",

issn = "0021-8979",

publisher = "AIP Publishing",

number = "9",

}

TY - JOUR

T1 - Texture formation in sputter-deposited (Nb0.7,Ti0.3)N thin films

AU - Iossad, N

AU - van der Pers, NM

AU - Grachev, S

AU - Roddatis, VV

AU - Jackson, BD

AU - Polyakov, SN

AU - Dmitriev, PN

AU - Klapwijk, TM

PY - 2002

Y1 - 2002

KW - academic journal papers

KW - ZX CWTS 1.00 <= JFIS < 3.00

M3 - Article

VL - 92

SP - 4999

EP - 5005

JO - Journal of Applied Physics

JF - Journal of Applied Physics

SN - 0021-8979

IS - 9

ER -