Texture formation in sputter-deposited (Nb0.7,Ti0.3)N thin films

N Iossad, NM van der Pers, S Grachev, VV Roddatis, BD Jackson, SN Polyakov, PN Dmitriev, TM Klapwijk

    Research output: Contribution to journalArticleScientificpeer-review

    18 Citations (Scopus)
    Original languageUndefined/Unknown
    Pages (from-to)4999-5005
    Number of pages7
    JournalJournal of Applied Physics
    Volume92
    Issue number9
    Publication statusPublished - 2002

    Keywords

    • academic journal papers
    • ZX CWTS 1.00 <= JFIS < 3.00

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