The behaviour of deuterium incorporated into buried oxide of SIMOX

A Rivera, A van Veen, H Schut, JMM de Nijs, P Balk, PFA Alkemade

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	287-290
Number of pages	4
Journal	Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms
Volume	178
Publication status	Published - 2001

Keywords

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title = "The behaviour of deuterium incorporated into buried oxide of SIMOX",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "A Rivera and {van Veen}, A and H Schut and {de Nijs}, JMM and P Balk and PFA Alkemade",

year = "2001",

language = "Undefined/Unknown",

volume = "178",

pages = "287--290",

journal = "Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms",

issn = "0168-583X",

publisher = "Elsevier",

}

TY - JOUR

T1 - The behaviour of deuterium incorporated into buried oxide of SIMOX

AU - Rivera, A

AU - van Veen, A

AU - Schut, H

AU - de Nijs, JMM

AU - Balk, P

AU - Alkemade, PFA

PY - 2001

Y1 - 2001

KW - ZX Int.klas.verslagjaar < 2002

M3 - Article

VL - 178

SP - 287

EP - 290

JO - Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms

JF - Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms

SN - 0168-583X

ER -