The behaviour of deuterium incorporated into the buried oxide of SIMOX.

A Rivera, A van Veen, H Schut, JMM de Nijs, p Balk, PFA Alkemade

    Research output: Contribution to journalArticleScientificpeer-review

    Original languageUndefined/Unknown
    Pages (from-to)287-290
    Number of pages4
    JournalNuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms
    Issue number1-4
    Publication statusPublished - 2000


    • ZX Int.klas.verslagjaar < 2002

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