The complex formation of ripples during depth profiling of Si with low energy, grazing oxygen beams

ZX Jiang, PFA Alkemade

    Research output: Contribution to journalArticleScientificpeer-review

    86 Citations (Scopus)
    Original languageUndefined/Unknown
    Pages (from-to)315-318
    Number of pages4
    JournalApplied Physics Letters
    Volume73
    Issue number3
    Publication statusPublished - 1998

    Bibliographical note

    ISSN: 00036951

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