The complex formation of ripples during depth profiling of Si with low energy, grazing oxygen beams

ZX Jiang, PFA Alkemade

Research output: Contribution to journal › Article › Scientific › peer-review

ISSN: 00036951

Cite this

@article{e6d871f99a1846009353f6ab30f891fb,

title = "The complex formation of ripples during depth profiling of Si with low energy, grazing oxygen beams",

author = "ZX Jiang and PFA Alkemade",

note = "ISSN: 00036951",

year = "1998",

language = "Undefined/Unknown",

volume = "73",

pages = "315--318",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics Publising LLC",

number = "3",

}