The complex mechanisms of ion-beam-induced deposition

P Chen, PFA Alkemade, HWM Salemink

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	5123-5126
Number of pages	4
Journal	Japanese Journal of Applied Physics. Part 2, Letters & Express Lettres
Volume	47
Issue number	6
Publication status	Published - 2008

Keywords

@article{b41a8bc640134a9695a384b9788575e1,

title = "The complex mechanisms of ion-beam-induced deposition",

keywords = "CWTS JFIS < 0.75",

author = "P Chen and PFA Alkemade and HWM Salemink",

year = "2008",

language = "Undefined/Unknown",

volume = "47",

pages = "5123--5126",

journal = "Japanese Journal of Applied Physics. Part 2, Letters & Express Lettres",

issn = "0021-4922",

publisher = "Japan Society of Applied Physics",

number = "6",

}

TY - JOUR

T1 - The complex mechanisms of ion-beam-induced deposition

AU - Chen, P

AU - Alkemade, PFA

AU - Salemink, HWM

PY - 2008

Y1 - 2008

KW - CWTS JFIS < 0.75

M3 - Article

SN - 0021-4922

VL - 47

SP - 5123

EP - 5126

JO - Japanese Journal of Applied Physics. Part 2, Letters & Express Lettres

JF - Japanese Journal of Applied Physics. Part 2, Letters & Express Lettres

IS - 6

ER -