The design of high performance mechatronics. High-tech functionality by multidisciplinary system integration.

RH Munnig Schmidt, G Schitter, J van Eijk

Research output: Book/ReportBookScientific

Abstract

Since they entered our world around the middle of the 20th century, the application of mechatronics has enhanced our lives with functionality based on the integration of electronics, control systems and electric drives. This book deals with the special class of mechatronics that has enabled the exceptional levels of accuracy and speed of high-tech equipment applied in the semiconductor industry, realising the continuous shrink in detailing of micro-electronics and MEMS. As well as the more frequently presented standard subjects of dynamics, motion control, electronics and electromechanics, this book includes an overview of systems engineering, optics and precision measurement systems, in an attempt to establish a connection between these fields under one umbrella.
Original languageEnglish
Place of PublicationAmsterdam
PublisherIOS Press
Number of pages753
ISBN (Print)978-1-60750-825-0
DOIs
Publication statusPublished - 2011

Publication series

Name
PublisherIOS Press BV

Keywords

  • authored books
  • Boek internat.wet. > 80 pag

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