The development of micromachined humidity sensors based on a dielectric of porous silicon

E Connolly

Research output: Book/ReportReportProfessional

Original languageUndefined/Unknown
Place of PublicationDelft
PublisherTechnische Universiteit Delft, Faculty ITS
Number of pages12
Publication statusPublished - 2001

Publication series

Name
PublisherTechnische Universiteit Delft, Faculty ITS

Bibliographical note

Del4694

Keywords

  • ZX Int.klas.verslagjaar < 2002

Cite this