The development of micromachined humidity sensors based on a dielectric of porous silicon

E Connolly

Research output: Book/ReportReportScientific

Original languageUndefined/Unknown
Place of PublicationDelft
PublisherDelft University of Technology, Faculty ITS
Number of pages6
Publication statusPublished - 2002

Publication series

Name
PublisherDelft University of Technology, Faculty ITS

Bibliographical note

Meeting 4

Keywords

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