The development of micromachined humidity sensors based on a dielectric of porous silicon

E Connolly

Research output: Book/Report › Report › Professional

Original languageUndefined/Unknown
Place of PublicationDelft
PublisherTechnische Universiteit Delft, Faculty ITS
Number of pages7
Publication statusPublished - 2001

Publication series

Name
PublisherTechnische Universiteit Delft, Faculty ITS

Keywords

  • ZX Int.klas.verslagjaar < 2002

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