The development of micromachined humidity sensors based on a dielectric of porous silicon

E Connolly

Research output: Book/Report › Report › Professional

Original language	Undefined/Unknown
Place of Publication	Delft
Publisher	Delft Unverity of Technology, Faculty ITS
Number of pages	11
Publication status	Published - 2002

Name
Publisher	Delft Unverity of Technology, Faculty ITS

Meeting 3

Keywords

@book{41e92ff10a114e79a62313b854307a5f,

title = "The development of micromachined humidity sensors based on a dielectric of porous silicon",

keywords = "Elektrotechniek, Techniek, Geen BTA classificatie",

author = "E Connolly",

note = "Meeting 3",

year = "2002",

language = "Undefined/Unknown",

publisher = "Delft Unverity of Technology, Faculty ITS",

}

TY - BOOK

T1 - The development of micromachined humidity sensors based on a dielectric of porous silicon

AU - Connolly, E

N1 - Meeting 3

PY - 2002

Y1 - 2002

KW - Elektrotechniek

KW - Techniek

KW - Geen BTA classificatie

M3 - Report

BT - The development of micromachined humidity sensors based on a dielectric of porous silicon

PB - Delft Unverity of Technology, Faculty ITS

CY - Delft

ER -