The direct growth of carbon nanotubes as vertical interconnects in 3D integrated circuits

INIS

• growth 100%
• integrated circuits 100%
• carbon nanotubes 100%
• applications 30%
• devices 30%
• transistors 10%
• actuators 10%
• metals 10%
• semiconductor materials 10%
• comparative evaluations 10%
• viability 10%
• performance 10%
• sensors 10%

Material Science

• Electronic Circuit 100%
• Carbon Nanotube 100%
• Devices 30%
• Electronics 20%
• Semiconductor Material 10%
• Actuator 10%
• Metal 10%
• Transistor 10%
• Sensor 10%

Engineering

• Interconnects 100%
• Three Dimensional Integrated Circuits 100%
• Electrical Device 20%
• Integrated Circuit 20%
• Demonstrates 20%
• Electrical Performance 10%
• Semiconductor 10%