The effect of Cu interlayers on grain size and stress in sputtered Fe-Cu multilayered thin films

N Shamsutdinov, AJ Bottger, FD Tichelaar

    Research output: Contribution to journalArticleScientificpeer-review

    17 Citations (Scopus)
    Original languageUndefined/Unknown
    Pages (from-to)1727-1732
    Number of pages6
    JournalScripta Materialia
    Publication statusPublished - 2006


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    • CWTS 0.75 <= JFIS < 2.00

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