The effect of intrinsic birefringence in deep UV-lithography

A Serebriakov, E. Maksimov, F Bociort, JJM Braat

Research output: Contribution to journal › Conference article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	624-626
Number of pages	3
Journal	Proceedings of SPIE- International Society for Optical Engineering
Volume	5249
Publication status	Published - 2004

Keywords

@article{11a4f00b128e403cae9c440bd0c88a09,

title = "The effect of intrinsic birefringence in deep UV-lithography",

keywords = "Peer-lijst tijdschrift",

author = "A Serebriakov and E. Maksimov and F Bociort and JJM Braat",

year = "2004",

language = "Undefined/Unknown",

volume = "5249",

pages = "624--626",

journal = "Proceedings of SPIE- International Society for Optical Engineering",

issn = "0277-786X",

publisher = "SPIE",

}

TY - JOUR

T1 - The effect of intrinsic birefringence in deep UV-lithography

AU - Serebriakov, A

AU - Maksimov, E.

AU - Bociort, F

AU - Braat, JJM

PY - 2004

Y1 - 2004

KW - Peer-lijst tijdschrift

M3 - Conference article

SN - 0277-786X

VL - 5249

SP - 624

EP - 626

JO - Proceedings of SPIE- International Society for Optical Engineering

JF - Proceedings of SPIE- International Society for Optical Engineering

ER -