@inproceedings{6adbfef47a5b46ddbd8227acc0854d8e,
title = "The effect of sidewall roughness on line edge roughness in top-down scanning electron microscopy images",
author = "T Verduin and SR Lokhorst and P Kruit and CW Hagen",
note = "Harvest; Metrology, Inspection, and Process Control for Microlithography XXIX ; Conference date: 23-02-2015 Through 26-02-2015",
year = "2015",
doi = "10.1117/12.2085768",
language = "English",
isbn = "9781628415261",
publisher = "SPIE",
pages = "1--18",
editor = "JP Cain and MI Sanchez",
booktitle = "Metrology, Inspection, and Process Control for Microlithography XXIX",
address = "United States",
}