A CMOS electrothermal frequency-locked-loop (FLL) is presented, whose output frequency is determined by the temperature-dependent thermal diffusivity of the silicon substrate. Measurements show that this temperature dependence is essentially process independent. After a batch calibration, the electrothermal FLL has an untrimmed inaccuracy of less than Â±0.7Â°C (3Â¿) over the temperature range -40Â°C to 100Â°C.
|Conference||Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International, Lyon|
|Period||10/06/07 → 14/06/07|
- conference contrib. refereed
- Conf.proc. > 3 pag