The effect of substrate doping on the behaviour of a CMOS electrothermal frequency-locked-loop

C Zhang, KAA Makinwa

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

9 Citations (Scopus)

Abstract

A CMOS electrothermal frequency-locked-loop (FLL) is presented, whose output frequency is determined by the temperature-dependent thermal diffusivity of the silicon substrate. Measurements show that this temperature dependence is essentially process independent. After a batch calibration, the electrothermal FLL has an untrimmed inaccuracy of less than ±0.7°C (3¿) over the temperature range -40°C to 100°C.
Original languageUndefined/Unknown
Title of host publicationSolid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International
Editors s.n.
Place of PublicationLyon, France
PublisherIEEE Society
Pages2283-2286
Number of pages4
ISBN (Print)1-4244-0842-3
DOIs
Publication statusPublished - 2007
EventSolid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International, Lyon - Lyon, France
Duration: 10 Jun 200714 Jun 2007

Publication series

Name
PublisherIEEE

Conference

ConferenceSolid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International, Lyon
Period10/06/0714/06/07

Keywords

  • conference contrib. refereed
  • Conf.proc. > 3 pag

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