The extraordinary role of the AlN interlayer in growth of AlN sputtered on Ti electrodes

AT Tran, G Pandraud, FD Tichelaar, MD Nguyen, H Schellevis, PM Sarro

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4 Citations (Scopus)

Harvest
Published online 27-11-2013

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@article{10818c1a748b4e5bb468f32ae6376007,

title = "The extraordinary role of the AlN interlayer in growth of AlN sputtered on Ti electrodes",

author = "AT Tran and G Pandraud and FD Tichelaar and MD Nguyen and H Schellevis and PM Sarro",

note = "Harvest Published online 27-11-2013",

year = "2013",

doi = "10.1063/1.4835035",

language = "English",

volume = "103",

pages = "221909--1--221909--3",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics Publising LLC",

number = "22",

}

TY - JOUR

T1 - The extraordinary role of the AlN interlayer in growth of AlN sputtered on Ti electrodes

AU - Tran, AT

AU - Pandraud, G

AU - Tichelaar, FD

AU - Nguyen, MD

AU - Schellevis, H

AU - Sarro, PM

N1 - Harvest Published online 27-11-2013

PY - 2013

Y1 - 2013

U2 - 10.1063/1.4835035

DO - 10.1063/1.4835035

M3 - Article

SN - 0003-6951

VL - 103

SP - 221909-1-221909-3

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 22

ER -