The extraordinary role of the AlN interlayer in growth of AlN sputtered on Ti electrodes

Research output: Contribution to journalArticleScientificpeer-review

4 Citations (Scopus)
Original languageEnglish
Pages (from-to)221909-1-221909-3
JournalApplied Physics Letters
Volume103
Issue number22
DOIs
Publication statusPublished - 2013

Cite this