The future of focused electron beam-induced processing

CW Hagen

    Research output: Contribution to journal › Article › Scientific › peer-review

    31 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)1599-1605
    Number of pages7
    JournalApplied Physics A: materials science & processing
    Volume117
    Publication statusPublished - 2014

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