Original language | English |
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Pages (from-to) | 126-130 |
Number of pages | 5 |
Journal | Microelectronic Engineering |
Volume | 156 |
DOIs | |
Publication status | Published - 2016 |
The growth of carbon nanotubes on electrically conductive ZrN support layers for through-silicon vias
S Vollebregt, S Banerjee, FD Tichelaar, R Ishihara
Research output: Contribution to journal › Article › Scientific › peer-review
3
Citations
(Scopus)