The growth of carbon nanotubes on electrically conductive ZrN support layers for through-silicon vias

Research output: Contribution to journalArticleScientificpeer-review

3 Citations (Scopus)
Original languageEnglish
Pages (from-to)126-130
Number of pages5
JournalMicroelectronic Engineering
Volume156
DOIs
Publication statusPublished - 2016

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