The growth of carbon nanotubes on electrically conductive ZrN support layers for through-silicon vias

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3 Citations (Scopus)

Original language	English
Pages (from-to)	126-130
Number of pages	5
Journal	Microelectronic Engineering
Volume	156
DOIs	https://doi.org/10.1016/j.mee.2016.01.034
Publication status	Published - 2016

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@article{e81de7fca3b64f148f017e38ef3d34f7,

title = "The growth of carbon nanotubes on electrically conductive ZrN support layers for through-silicon vias",

author = "S Vollebregt and S Banerjee and FD Tichelaar and R Ishihara",

note = "Harvest Sourish Banerjee = Indushree Banerjee? Tu Delft Article in press; Available online 29 January 2016 gecheckt 5-4-2016",

year = "2016",

doi = "10.1016/j.mee.2016.01.034",

language = "English",

volume = "156",

pages = "126--130",

journal = "Microelectronic Engineering",

issn = "0167-9317",

publisher = "Elsevier",

}

TY - JOUR

T1 - The growth of carbon nanotubes on electrically conductive ZrN support layers for through-silicon vias

AU - Vollebregt, S

AU - Banerjee, S

AU - Tichelaar, FD

AU - Ishihara, R

N1 - Harvest Sourish Banerjee = Indushree Banerjee? Tu Delft Article in press; Available online 29 January 2016 gecheckt 5-4-2016

PY - 2016

Y1 - 2016

U2 - 10.1016/j.mee.2016.01.034

DO - 10.1016/j.mee.2016.01.034

M3 - Article

VL - 156

SP - 126

EP - 130

JO - Microelectronic Engineering

JF - Microelectronic Engineering

SN - 0167-9317

ER -